AMAT 0190-37993 DeviceNet Scanner Pro (3U CompactPCI)
AMAT 0190-37993: DeviceNet Scanner Pro (3U CompactPCI)
The AMAT 0190-37993 is a high-performance communication interface card, professionally known as the DeviceNet Scanner Pro.
Built on the 3U CompactPCI (cPCI) architecture, this module is manufactured for Applied Materials (often by SST/Molex) to serve as a high-speed master node.
It is a critical component in 300mm wafer processing tools, such as the Producer, Centura, and Endura platforms, where it manages complex networks of mass flow controllers (MFCs), valves, and sensors.
Technical Parameter Table
| Parameter | Specification |
| Manufacturer | Applied Materials (AMAT) / SST (Molex) |
| Part Number | 0190-37993 |
| Model Designation | DeviceNet Scanner Pro (DNP-CPCI-3U-4) |
| Form Factor | 3U CompactPCI (cPCI) |
| Communication Protocol | DeviceNet (CAN-based) |
| Data Rates | 125, 250, and 500 Kbps (Auto-Baud) |
| Interface Channels | Single or Dual Channel (Configuration Dependent) |
| Diagnostic Interface | Front Panel Status LEDs (MOD/NET) |
| Operating Temperature | 0°C to 60°C |
Product Advantages and Features
Scanner Pro Logic: Features advanced onboard processing that offloads the DeviceNet protocol management from the system’s main VME/SBC CPU, reducing system latency.
High-Density Integration: The 3U cPCI form factor allows for a dense electronics footprint, supporting the massive I/O requirements of modern multi-chamber tools.
Plug-and-Play Compatibility: Designed as a direct “Pro” upgrade or replacement for legacy DeviceNet cards (like the 0190-08680), ensuring seamless integration with AMAT software frameworks.
Real-Time Diagnostics: Provides immediate visual feedback via high-visibility LEDs for “Module Status” and “Network Status,” essential for rapid floor-side troubleshooting.
Application Cases
Chamber Process Control: Managing the deterministic timing required for gas switching and plasma ignition in Etch and CVD chambers.
Distributed I/O Management: Coordinating hundreds of digital and analog signals across a single DeviceNet trunk line in complex 300mm mainframes.
System Upgrades: Replacing older “Standard” scanner cards to improve network throughput and stability in high-volume manufacturing (HVM) environments.
Related Models & Same Series
The 0190-37993 is a flagship interface card in the cPCI series, often found alongside:
0190-08680: Standard Dual-Channel DeviceNet Card.
0190-14903: 4-Port high-density DeviceNet interface.
0190-07451: Analog I/O CPCI Board.
0190-20122: System VME/cPCI Central Controller.
Unique Product Description
The AMAT 0190-37993 is the “Signal Traffic Controller” of the semiconductor tool. In the precision-driven world of 2nm and 3nm fabrication, the margin for communication delay is zero.
The “Scanner Pro” architecture of the 37993 ensures that process commands reach the hardware with sub-millisecond repeatability.
Its unique combination of the robust SST protocol stack and the industrial cPCI bus makes it the preferred choice for fabs requiring the highest levels of network reliability and “Zero-Packet-Loss” performance.
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Installation and Maintenance
Installation Protocol
ESD Safety: Always wear a grounded wrist strap. The 0190-37993 contains sensitive CMOS logic that can be damaged by invisible static discharge.
Alignment: Slide the card into the designated 3U slot. Ensure the J1/J2 connectors on the backplane are perfectly aligned before applying firm pressure to seat the card.
Securing: Tighten the front-panel captive screws to 3 in-lbs to ensure a proper ground-to-chassis connection.
Network Commissioning: Use the tool’s configuration utility to map the DeviceNet nodes to the new scanner card.
Maintenance Procedures
LED Monitoring: A solid green MOD LED indicates the card is healthy. A flashing red NET LED typically signifies a duplicate MAC ID or a network cabling fault.
Connector Integrity: Periodically inspect the front-facing DeviceNet ports for “pin-spread” or oxidation, which can cause intermittent communication drops.
Firmware Verification: When swapping cards between tools, verify that the onboard firmware version matches the system software requirements to prevent “Incompatible Hardware” errors during boot-up