AMAT 0241-58255 REV05 PCB

AMAT 0241-58255 is a high-precision assembly component manufactured by Applied Materials (AMAT).

It is primarily utilized in the gas delivery and fluid handling subsystems of semiconductor fabrication equipment.

Specifically, it is often identified as a Gas Line Assembly or Manifold Component used within the Applied Materials Producer and Centura series platforms.

Introduction

The AMAT 0241-58255 is engineered for the controlled delivery of process gases in ultra-high purity (UHP) environments.

In semiconductor manufacturing, the stability and purity of gas flow are paramount to wafer yield.

This component is designed to bridge the gap between gas cabinets and the process chamber, ensuring leak-tight performance under varying pressure and temperature conditions.

Technical Parameter Table

While specific internal schematics are proprietary to the OEM, the standard technical profile for this assembly class is as follows:

Related Models

The 0241-58255 belongs to a broader family of fluid and gas handling parts:

0241-4XXXX: Legacy gas distribution manifolds.

0241-5XXXX: Modern modular gas delivery assemblies.

0190-XXXXX: Gas boxes and MFC (Mass Flow Controller) interface modules.

Application Cases

CVD Process Gas Routing: Directing precursor gases like $SiH_4$ or $NH_3$ into the deposition chamber.

Chamber Purging: Providing high-integrity paths for inert Nitrogen ($N_2$) or Argon ($Ar$) during chamber cleaning cycles.

Tool Refurbishment: Fabs often use this specific part number during “PM” (Preventative Maintenance) cycles to replace worn stainless steel lines that may have developed micro-corrosion.

Product Advantages and Features

UHP Integrity: Constructed from Vacuum Induction Melted (VIM) and Vacuum Arc Remelted (VAR) steel to minimize outgassing.

Corrosion Resistance: Specially treated to withstand corrosive halogen gases (Fluorine, Chlorine) used in etching.

Modular Design: Features standardized fittings for quick swap-outs, reducing tool downtime during maintenance.

Vibration Damping: Engineered to resist mechanical vibrations from the vacuum pumps, maintaining seal integrity over millions of cycles.

Other Models in the Same Series

AMAT 0241-58254: (Standard length variant)

AMAT 0241-58256: (Angled/Offset configuration)

AMAT 0010-XXXXX: Corresponding chamber-side heater/gas plate assemblies.

Installation and Maintenance

Cleanroom Protocol: Unpack the component only within a Class 10/100 environment to prevent particulate contamination.

Gasket Management: Always use a new nickel or stainless steel VCR gasket during installation. Never reuse old gaskets.

Torque Requirements: Use a specialized VCR wrench. Typically, tighten “finger-tight” plus 1/8 to 1/4 turn to ensure a helium-leak-tight seal.

Leak Detection: Post-installation, perform a helium spray test. The leak rate must be less than $1 \times 10^{-9} \text{ mbar·l/s}$.

Unique Product Description

The AMAT 0241-58255 represents the “circulatory system” of the semiconductor tool.

Its electropolished interior surface is so smooth that it prevents individual atoms from getting trapped, ensuring that when you switch from one process gas to another, there is zero cross-contamination.

For engineers managing Producer SE or GT platforms, this part is a staple for maintaining the high-vacuum precision required for sub-7nm node manufacturing.