LAM 810-099175-012 VME bus analog input/output board card

LAM Research 810-099175-012 is a highly integrated VME bus Analog I/O Board.

It belongs to the high-performance controller series of LAM Research and is mainly used in the 2300 series and Alliance series semiconductor process equipment.

In the workstation containing the KUKA KRC2 robot, the function of this board card is usually to monitor and adjust the precise environmental parameters related to the robot’s movements (such as vacuum degree, air pressure, radio frequency power, etc.).

1. Technical Specifications and Roles

This board card is the “sensory organ” in the system, responsible for processing signals that are not simply “on/off” but require precise values.

Detailed description of features

Manufacturer LAM Research

Model 810-099175-012

Type Analog Input/Output Module (AIO)

Bus interface VMEbus (Standard 6U)

The number of channels typically includes multiple 12-bit or 16-bit analog input and output channels

Pressure control and flow control (MFC) for application environment wafer etching (Etch) and vapor deposition (CVD) systems

2. Functions in the KUKA robot System

Although the KUKA robot (via DSE-IBS 3.02) handles motion, the 810-099175-012 is responsible for ensuring that the “physical environment” of the robot’s movements is safe:

Vacuum interlock monitoring: It reads the analog voltage signal of the vacuum gauge in real time.

If the vacuum degree does not reach the set value (the value is inaccurate), it will notify the system through the VME bus, thereby locking the entry permission of the KUKA robot.

Mass Flow Control (MFC) interface: In some complex configurations, it regulates the gas flow rate, while the robot performs wafer transfer in a specific pressure environment to prevent particle contamination.

High-precision feedback: Unlike the previously mentioned VIOP III (810-046015-010), which handles switching logic, this board card (810-099175-012) processes precise linear signals.

3. Comparison of Series Models

The 810-099175 series has multiple suffix versions, reflecting the evolution of hardware:

810-099175-001/005: Early version, mainly used for older machines, with a relatively low sampling rate.

810-099175-010: Standard version, optimized anti-electromagnetic interference (EMI) capability.

810-099175-012: The current advanced version usually features higher conversion accuracy (Resolution) and faster signal response speed, which can better meet the strict real-time requirements of 300mm wafer processes.

4. Common Problem Diagnosis

If the board card is damaged, the following phenomena usually occur:

Signal Drift: Unstable sensor readings. For instance, even if the chamber has been completely evacuated, the reading still indicates residual pressure.

Analog full-scale error: The input signal gets stuck at the maximum value (such as 10V) or the minimum value (0V), causing the system to consider the sensor damaged.

VME Parity Error: Causes the entire VME control chassis to freeze or the KUKA robot to suddenly stop responding.

Maintenance suggestions

Calibration: After 2 to 3 years of use, the internal reference voltage of this type of analog board card may experience a slight deviation. It is recommended to perform zero-point calibration regularly.

Heat dissipation: Ensure that the case fan is working properly. Because analog circuits are sensitive to temperature, overheating can cause errors in the readings of 810-099 and 175-012