AMAT AKT 0241-58482 PCB
AMAT 0241-58482 is a high-performance industrial assembly developed by Applied Materials (AMAT).
This component is a specialized part of the gas delivery and distribution network, specifically designed for use in advanced semiconductor processing equipment such as the Centura, Endura, and Producer platforms.
Introduction
The AMAT 0241-58482 plays a vital role in the fluid dynamics of a semiconductor tool. As a precision-engineered gas line or manifold assembly, it is responsible for the stable transport of high-purity process gases into the reaction chamber.
In an industry where even a parts-per-billion level of contamination can result in catastrophic yield loss, the 0241-58482 provides the structural integrity and internal cleanliness required for modern thin-film deposition and etching processes.
Technical Parameter Table
The following table outlines the technical profile for this specific AMAT assembly:
| Feature | Specification |
| Manufacturer | Applied Materials (AMAT) |
| Part Number | 0241-58482 |
| Component Type | Gas Feed / Manifold Assembly |
| Material Type | 316L Stainless Steel (VIM-VAR) |
| Interior Surface | Ultra-High Purity (UHP) Electropolished |
| Connection Interface | VCR / Face Seal Fittings |
| Max Operating Temp | Up to 150°C (depending on seal material) |
| Application | CVD, PECVD, and ALD Systems |
Related Models
The 0241-58482 is often integrated alongside these related components in the gas box or chamber lid:
AMAT 0241-XXXXX Series: Various gas delivery tubes and modular manifolds.
AMAT 0040-XXXXX: Heater pedestal and wafer support assemblies.
AMAT 0190-XXXXX: Gas control valves and mass flow controller (MFC) blocks.
Application Cases
Atomic Layer Deposition (ALD): Used where extremely precise gas pulses are required, demanding zero “dead volume” in the delivery line.
Plasma Enhanced CVD (PECVD): Guiding precursor gases to the showerhead assembly for uniform film growth across 300mm wafers.
Refurbishment Projects: A critical replacement part for aging 200mm and 300mm tools to restore vacuum performance to original OEM specifications.
Product Advantages and Features
Zero-Leak Integrity: Designed to meet ultra-high vacuum (UHV) standards, preventing oxygen or moisture ingress.
VIM-VAR Steel Construction: Uses Vacuum Induction Melted/Vacuum Arc Remelted steel to eliminate impurities within the metal itself, preventing “outgassing.”
Optimized Flow Path: The internal geometry is designed to minimize turbulence, ensuring a laminar flow of gases to the process chamber.
Durability: Resistant to the corrosive effects of cleaning gases like $NF_3$ (Nitrogen Trifluoride).
Other Models in the Same Series
AMAT 0241-58481: (Standard configuration variant)
AMAT 0241-58483: (Extended length or alternate fitting version)
AMAT 0241-15240: (Legacy gas distribution manifold)
Installation and Maintenance
Handling: Components are typically double-bagged; only open the inner bag inside a certified cleanroom environment.
Alignment: Ensure the VCR gaskets are perfectly centered before tightening to prevent “shaving” of the gasket, which can create metal particles.
Tightening: Follow the standard “1/8 turn past finger-tight” rule for VCR connections to ensure a metal-to-metal seal without over-torquing.
Periodic Inspection: During “Wet Clean” cycles, inspect for any signs of discoloration or pitting on the internal surfaces of the assembly.
Unique Product Description
The AMAT 0241-58482 is the benchmark for reliability in gas delivery hardware.
It is specifically manufactured to handle the high-cycle demands of modern Fabs, where tools operate 24/7.
By utilizing electropolished internal bores, this assembly ensures that process gases remain uncontaminated from the source to the wafer.
For facility managers focusing on Producer GT or Centura AP maintenance,
the 0241-58482 is an essential component for maintaining “Golden Tool” performance levels and maximizing wafer-per-hour output