LAM 853-001983-110 Semiconductor Wafer Processing Components
The 853-001983-110 is a specific part number associated with LAM Research, a leader in semiconductor manufacturing equipment.
In industrial settings, LAM Research hardware is frequently integrated with KUKA robotics for wafer handling and processing.
Technical Identification
Based on the part number sequence (853-xxxxxx-xxx), this is an Interface Board or End Point Detector Assembly component.
Feature Description
Manufacturer LAM Research
Model Number 853-001983-110
Category Semiconductor Wafer Processing Components
Function Interface/Data Conversion or End Point Detection
System Context Used in Lam Etch/Deposition tools (e.g., Alliance, 2300. or Versys series)
Role in a KUKA-Integrated Environment
853-001983-110
When you see a LAM part number in a KUKA context, it usually relates to the End-of-Arm Tooling (EOAT) or the Communication Bridge between the robot and the semiconductor tool:
Interface Board: This board often serves as the “translator” between the LAM tool’s proprietary control system and the KUKA controller (KRC2/KRC4). It manages the I/O signals that tell the robot when a wafer is ready to be picked or placed.
853-001983-110
End Point Detection (EPD): Some variants of this 853-series assembly are used for optical monitoring during the etching process. It ensures the robot or tool stops at exactly the right micro-second when a layer of material is removed.
Wafer Handling: If this board is mounted near the robot’s gripper, it may be handling vacuum sensor data or wafer-presence detection signals.
Troubleshooting & Maintenance
If this board is failing, you might encounter issues like:
“Timeout” Errors: The KUKA robot waits for a signal from the LAM tool that never arrives.
Wafer Misalignment: If the board handles sensor data for wafer centering, the robot may attempt to pick the wafer incorrectly.
Interbus/Fieldbus Faults: Since many older LAM/KUKA integrations used Interbus (related to the DSE-IBS card you asked about earlier), a fault in this board can crash the entire communication loop.